Consideration of a Ga-FIB in Lamella Sample Prep for EBIC/EBAC Analysis of Advanced-Node SRAMs
Year: 2024
Type: conference-paper
Authors: Gregory M. Johnson, Cheryl Hartfield, Andreas Rummel, Heiko Stegmann, Lorenz Lechner
Institution: Carl Zeiss (Germany)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4403685071