High Contact Resistance from Preferential Oxidation of Silane Gas
Year: 2024
Type: conference-paper
Authors: Wentao Qin, Esteban Ortiz, Brandon Lent, Tim McGrady, Golnaz Yousefi, Randy Yach, Avik Chunder, Denise Barrientos, Manny Espinosa, Al Merino, Christine Janasky, Tina-cook Ruiz, Andy Blemker
Institution: Microchip Technology (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4403685110