Work

Correlative Microscopy: In-Situ AFM-in-SEM Introduction, Capabilities, and Case Studies Semiconductor Materials and Batteries

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024tpk1

Authors: Jan Neuman, Radek Dao, Ondøej Novotný, Veronika Hegrová, Rosalinda Ring, Libor Strakoš, Lukáš Kormoš, Umberto Celano

Institutions: Thermo Fisher Scientific (Czechia), Arizona State University

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403685114

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