Work

Implementation of FIB Automation Methodologies for TEM Applications in Memory Devices

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024p0392

Authors: Sang Hoon Lee, Joshua-Adams Miller, Veronica Perez, Kenton Burns, Xue Rui, Shixin Wang, SookFun Chan, Ning Lu, Yun-Yu Wang, Qiang Jin, Robert Gifford, Tyler Lenzi, Cheng-Han Li, Sven Beunen

Institution: Micron (United States)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403685149

FWCI: 0.781

Cites:

Cited by: 1

Related to: 10