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Large Area Circuit Delayering from the Backside Using Chemically Assisted Focused Ion Beam Sputtering with Optical Metrology Feedback

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024p0454

Authors: Michael DiBattista, Robert Chivas, Jonathan Sheeder, Scott Silverman, Henry Beaulieu

Institution: University of Illinois Urbana-Champaign

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403685159

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