Work

Effective FA Approach in Uncovering Gate-to-D/S Tungsten Spur Fabrication Defect

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024p0427

Authors: Alex Marionne del Castillo, Alfred Jay Rafael, Jolina May Matibag, Jae Saladar, Robin Evangelista, Raymond Mendaros

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403685207

FWCI: 0.806

Cites:

Cited by: 1

Related to: 10