Work

Using FIB Grooving to Prepare Top-down-Nanoprobed Sample for Site-Specific Cross-Sectional Nanoprobing Analysis

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024p0411

Authors: S.L. Ting, P.K. Tan, T.T. Yu, P.T. Ng, C.Q. Chen

Institution: GlobalFoundries (Singapore)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403685313

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