Work

Localization of Subtle Front-End FinFET Defects Using EBIC

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024p0205

Authors: Nick Pronin, Khiem Ly, Tony Chrastecky, Jacob Levenson, Eric Yi, Kris Dickson, Sam Subramanian, Keith Serrels

Institution: NXP (United States)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403685315

FWCI: 1.612

Cites:

Cited by: 2

Related to: 10