Work

Wafer Level Monitoring of Optical Insertion Loss during Silicon Photonics Manufacturing

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024p0288

Authors: Felix Beaudoin, Takako Hirokawa, Yusheng Bian, Thomas Houghton, Yarong Lin, Kenneth Shea, Brian Popielarski, Norman Robson, Aaron Sinnott, Neil V. Sapra, Golam Bappi, John Fini

Institutions: GlobalFoundries (United States), Ayar Labs (United States)

Language: English

Topic: Photonic and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403685330

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