Work

Exploring the Effectiveness of Combining Electron-Beam Probing and Optical Techniques in a 16 nm Technology Device

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024p0259

Authors: Antonio Saavedra, Elham Amini, Jörg Jatzkowski, Tuba Kiyan, Lars Renkes, Christian Boit, Frank Altmann, Sebastian Brand, Jean-Pierre Seifert

Institutions: Technische Universität Berlin, Fraunhofer Institute for Microstructure of Materials and Systems

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4403685360

FWCI:

Cites:

Cited by:

Related to: 10