Work

Innovative Sample Preparation for Nano-Probing at Pixel Level in 3D BSI Imaging Products

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024p0248

Authors: Sophie Martin, Alexandre Jacquier, Emmanuel Petit, Philippe Larre

Institution: STMicroelectronics (France)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403685422

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