Work

E-beam Probing and E-beam-Assisted Device Alteration (EADA) for Fault Isolation in PowerVia and Advanced Technology Nodes

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024p0519

Authors: Jennifer J. Huening, Xianghong Tom Tong, Shuai Zhao, Ravi Thirugnanasambandam, Yunfei Wang, Hyuk Ju Ryu, Prasoon Joshi, Mitchell J. Senger, May Ling Oh, Renliang Yuan, Jacob Waelder, Anil Matte, Baohua Niu, Zhiyong Ma, Neel Leslie, James Vickers

Institutions: Intel (United States), Thermo Fisher Scientific (United States)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403685433

FWCI: 1.56

Cites:

Cited by: 2

Related to: 10