Work

An Improved Backside Deprocessing Technique for Advanced IC Devices

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024p0161

Authors: Susan Li, Jose Hulog, Zhaofeng Wang, Shixian Sui, Ming Zhang, Armen Andreasyan, Yeow Shen Goh

Institution: Infineon Technologies (United States)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403685518

FWCI: 0.799

Cites:

Cited by: 1

Related to: 10