Work

Polysilicon Line Damage and Burn-In Effectiveness in a 0.18 µm Mixed Signal Product

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024p0177

Authors: Jean-Philippe Manceau, Patrick Krenn, Isabella Hofer, Thomas Jost, Josef Ehgartner, Bastian Friesenbichler, Klaus-Peter Tschernay, Dann Evasco, Noel Lastima, Monica Giardi

Institution: AMS (Austria)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403685602

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