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An Innovative Analytics Platform for High-Resolution 3D Ion Imaging and SIMS Nanoanalytics with Precise Sample Navigation

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024p0188

Authors: Peter Gnauck, Alexander Ost, Torsten Richter

Institution: Raith (Germany)

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403685689

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