Work

Optimizations and Case Studies—Decapsulation of Hardened Epoxy SiC MOSFETs and Diodes via JIACO Microwave Induced Plasma Etching

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024p0058

Authors: Connor J. Sorrells, Kyle E. Nielsen, Bret A. Walters, Jiaqi Tang, Mark W. McKinnon

Institution: Microchip Technology (United States)

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403685723

FWCI: 0.779

Cites:

Cited by: 1

Related to: 10