Work

Etching Monitoring of Advanced Forksheet Devices Using AKONIS SIMS Tool

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024p0175

Authors: A-S. Robbes, O. Dulac, K. Soulard, M. Adier, S. Choi, D. Jacobson, A. Merkulov, R. Tilmann, P.A.W. van der Heide, A. Franquet

Institutions: Cameca (France), Cameca (United States), IMEC

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403685796

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