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Advanced FIB/SEM Sample Preparation and Analysis Techniques (2024 Update)

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024tpo1

Authors: Sam Subramanian, Eric Yi, Khiem Ly, Charles Petri, Tony Chrastecky, Jacob Levenson, Rohin Agny

Institution: NXP (United States)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403686027

FWCI:

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