Unlocking Insights into 3D Transistor Defects: The Power of Supplementing TEM with Elemental Electron Tomography
Year: 2024
Type: conference-paper
Authors: Yu Zhang, Kevin Davidson, Po-Cheng Lu, Frieder Baumann, Travis Mitchell
Institution: GlobalFoundries (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4403686106