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SIMS analysis of an oxide thin film with continuous composition gradient
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Year:
2024
Type:
conference-paper
Abstract:
International audience
Source:
HAL (Le Centre pour la Communication Scientifique Directe)
Authors:
Scola, Joseph,
Jomard, François,
Wolfman, Jérôme,
Negulescu, Béatrice,
Pinault-Thaury, M.A.
Institutions:
Groupe d’Étude de la Matière Condensée,
GREMAN, Matériaux, Microélectronique, Acoustique, Nanotechnologies
Language:
English
Topic:
Ion-surface interactions and analysis
Subfield:
Computational Mechanics
Field:
Engineering
Domain:
Physical Sciences
Open Access status:
green
OpenAlex ID:
W4403710655
FWCI:
Cites:
Cited by:
Related to:
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