Work

Development of a flat cutoff probe covered with a dielectric layer for non-invasive plasma diagnostics

Year: 2024

Type: article

Source: Plasma Sources Science and Technology

DOI: 10.1088/1361-6595/ad8ae6

Authors: Gwang-Seok Chae, Hee-Jung Yeom, Min Young Yoon, Jung-Hyung Kim, Hyo-Chang Lee

Institutions: Korea Aerospace University, Korea Research Institute of Standards and Science

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Ministry of Trade, Industry and Energy, Korea Research Institute of Standards and Science, National Research Foundation of Korea, Ministry of Science and ICT, South Korea, Korea Semiconductor Research Consortium, Korea Evaluation Institute of Industrial Technology

Awards: G1491680630, G2978557231, G3969275231, G5031028196, G6764738055, G8363443137

OpenAlex ID: W4403714678

FWCI: 0.411

Cites: 35

Cited by: 4

Related to: 10