Work

Influencing factors of self-aligned imaging in near-field lithography for the Fabry–Perot cavity effect

Year: 2024

Type: article

Source: Journal of the Optical Society of America B

DOI: 10.1364/josab.538952

Authors: Dinghai Rui, Libin Zhang, Huwen Ding, Hao Shen, Yayi Wei, Yajuan Su

Institutions: Chinese Academy of Sciences, University of Chinese Academy of Sciences

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: University of Chinese Academy of Sciences, Fundamental Research Funds for the Central Universities

Awards: G2652754060, G3307631189

OpenAlex ID: W4403758036

FWCI: 0.72

Cites: 25

Cited by: 7

Related to: 10