Improvement of charge trapping memory performance by modulating band alignment with oxygen plasma
Year: 2024
Type: article
Source: Applied Physics Letters
DOI: 10.1063/5.0224220
Authors: Puhao Chai, Jun Zhu, Kuangkuang Li, Jiale Chen
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G2380753390, G5093474436
OpenAlex ID: W4403765916
