Work

High performance and nearly wake-up free Hf0.5Zr0.5O2 ferroelectric capacitor realized by middle layer strategy with BEOL compatibility

Year: 2024

Type: article

Source: Nanotechnology

DOI: 10.1088/1361-6528/ad8bcc

Authors: Yin-Chi Liu, Gen-Ran Xie, Ji-Ning Yang, Hao Zhang, Dmitriy Anatolyevich Golosov, Chenjie Gu, Bao Zhu, Xiaohan Wu, Hong-Liang Lu, Shi-Jin Ding, Wenjun Liu

Institutions: Fudan University, Belarusian State University of Informatics and Radioelectronics, Ningbo University

Language: English

Topic: Ferroelectric and Negative Capacitance Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Science and Technology Commission of Shanghai Municipality, National Key Research and Development Program of China

Awards: G1145101426, G6706031542

OpenAlex ID: W4403820668

FWCI: 0.416

Cites: 18

Cited by: 4

Related to: 10