Work

Development of Assembly Techniques for Miniaturized in-line Pressure Sensor by Utilizing Thin Strain Sensor for High Reliability

Year: 2024

Type: article

Source: IEEJ Transactions on Sensors and Micromachines

DOI: 10.1541/ieejsmas.144.357

Authors: Hiroshi Ikeda, Masatoshi Kanamaru, Takanori Aono

Institution: Hitachi (Japan)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403933053

FWCI:

Cites: 25

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Related to: 10