Modeling Stress Effects from Fin Isolation in 7nm FinFET Transistors
Year: 2024
Type: conference-paper
Source: CAS proceedings
Authors: Angelo Rossoni, Zsolt M. Kovacs-Vajna, Luigi Colalongo, Rajesh Khamankar, Sharad Saxena, Tomasz Brozek
Institutions: University of Brescia, PDF Solutions (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4403937847