High-resolution chemical patterns from negative tone resists for the integration of extreme ultraviolet patterns of metal-oxide resists with directed self-assembly of block copolymers
Year: 2024
Type: article
DOI: 10.1116/6.0004046
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Energy Frontier Research Centers
Award: G5707437273
OpenAlex ID: W4403947799
