MEMS Precision Sensors Based on Process Innovation Technology
Year: 2024
Type: article
Abstract: This article introduces a novel process for achieving micro-scale thermal isolation through solid porous 3D microstructures. It proposes a method to improve existing thermal MEMS devices by utilizing thin-film membrane structures, develops a model for estimating the thermal conductivity of porous microstructures, and constructs porous 3D microstructures made of three different powder materials, studying their applicability for thermal isolation. Breakthroughs have been achieved in process preparation technology, enabling the production of precision MEMS sensors. These sensors are expected to find wide applications in smart cars, intelligent healthcare, electronic resonance sensors, and other fields.
DOI: 10.54097/6hmeqa88
Authors: Kang Shuai, Diandian Sang, Xiaohu Tang
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: diamond
OpenAlex ID: W4403986589