Work

CVD/ALD techniques for thin film oxides

Year: 2024

Type: conference-paper

Source: HAL

Authors: Burriel, Mónica, Munoz-Rojas, David

Institutions: Institut polytechnique de Grenoble, Laboratoire des Matériaux et du Génie Physique

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403992641

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