Work

Design of temperature and humidity control system for semiconductor manufacturing workshop

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3055249

Author: xingchao xu

Institution: Xijing University

Language: English

Topic: Advanced Sensor and Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4404034738

FWCI: 0.722

Cites:

Cited by: 1

Related to: 10