Design and fabrication of ultrahigh Q chip-based silica WGM micro-resonators for single-atom cavity-QED
Year: 2024
Type: article
Abstract: Of the many applications of whispering-gallery-mode (WGM) micro-resonators, single-atom cavity quantum electrodynamics (cavity-QED) poses the most extreme demands on mode volume, dimensions, and quality factor ( Q ). Here we present the procedure for the fabrication of chip-based, small mode-volume, ultrahigh- Q silica WGM micro-resonators, designed for single-emitter cavity-QED. We demonstrate micro-resonators at varying geometries, from toroidal to micro-spheres, yielding ultrahigh-qualities as high as 1.7 × 10 8 at 780nm. We present a comprehensive theoretical model that allows tailoring the fabrication process to attain the desired micro-resonator geometry.
Source: Optics Express
DOI: 10.1364/oe.540508
Institution: Weizmann Institute of Science
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,270
OpenAlex ID: W4404038300