Work

Atomic layer deposited protective coating of aluminum oxide on silver-based telescope mirror: a comparison between a pure ozone and H2O precursor

Year: 2024

Type: article

Abstract: Silver-based telescope mirrors excel in the visible infrared but require protective coatings to overcome low durability. A single-layer of aluminum oxide (AlOx) deposited through atomic layer deposition (ALD) using trimethylaluminum and water (H2O) at low temperatures (∼60°C) protects the silver without adversely impacting the optical performance of the mirrors, but in environmental tests under high humidity at high temperatures, they degrade quickly. This paper compares the performance of AlOx-protected silver-based mirrors using two oxygen precursors: H2O and pure ozone (PO). Initially comparable, the reflectance of the PO-prepared samples shows a 17% improvement over those prepared with H2O after environmental testing.

Source: Journal of Astronomical Telescopes Instruments and Systems

DOI: 10.1117/1.jatis.10.4.044007

Authors: Søren A. Tornøe, Brandon Cheney, Brian Dupraw, Yoshimasa Okamura, Andrew C. Phillips, Takayuki Hagiwara, Tetsuya Nishiguchi, Nobuhiko P. Kobayashi

Institutions: University of California, Santa Cruz, University of California Observatories

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: green

Funders: California Institute of Technology, Jet Propulsion Laboratory

OpenAlex ID: W4404048842

FWCI:

Cites: 12

Cited by:

Related to: 10