Work

Modified Si Oxidation Behavior by Ultrathin Ni Catalyst Enabling Oxidant‐Less Metal‐Assisted Chemical Etching

Year: 2024

Type: article

Source: Small

DOI: 10.1002/smll.202409091

Authors: Kyunghwan Kim, Sunhae Choi, Haekyun Bong, Jungwoo Oh

Institutions: Yonsei University, Korean Association Of Science and Technology Studies, Korea Institute of Science and Technology

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Ministry of Education, Ministry of Science and ICT, South Korea

Award: G294092147

OpenAlex ID: W4404051526

FWCI: 0.208

Cites: 56

Cited by: 2

Related to: 10