Experimental investigation on in-situ laser-assisted mechanical ruling of single crystal silicon
Year: 2024
Type: article
Source: Physica Scripta
Authors: Dong Yao, Guangfeng Shi, Siwei Meng
Institution: Changchun University of Science and Technology
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G1645355107, G6234085435
OpenAlex ID: W4404065462