Work

Electron temperature and ion density distribution on a vertical section in a weakly magnetized inductively coupled plasma

Year: 2024

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0003874

Authors: You He, Yi-Lang Jiang, Myoung-Jae Lee, Beom-Jun Seo, Ju-Ho Kim, Chin-Wook Chung

Institution: Hanyang University

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Ministry of Trade, Industry and Energy, Korea Semiconductor Research Consortium

Awards: G2531033225, G254945888, G4087693449, G626722953, G6355037862, G6821527106, G6875415179, G7333398235, G7902031766, G8267904650, G942948758

OpenAlex ID: W4404071571

FWCI: 0.104

Cites: 42

Cited by: 1

Related to: 10