Work

Atomic Regulation of Metal–Organic Framework Thin Film for Low- k Dielectric

Year: 2024

Type: article

Source: Chemistry of Materials

DOI: 10.1021/acs.chemmater.4c02057

Authors: Meng Cao, Jisheng Song, Haonan Ren, Fan Yang, Rong Chen

Institution: Huazhong University of Science and Technology

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Natural Science Foundation of Hubei Province, National Key Research and Development Program of China

Awards: G2845173115, G5922455198, G6248706903, G6949762422

OpenAlex ID: W4404122489

FWCI: 0.617

Cites: 69

Cited by: 8

Related to: 10