Work

Calorimetric Measurements of the Temperature of Metal Targets during Magnetron Sputtering

Year: 2024

Type: conference-paper

DOI: 10.1109/nap62956.2024.10739769

Authors: L.R. Shaginyan, A.I. Kuzmichev, M.I. Mironov

Institutions: Frantsevich Institute for Problems in Materials Science, National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute”

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404133277

FWCI: 4.28

Cites: 14

Cited by: 2

Related to: 10