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Impact of in situ heating on the structure, morphology, and electrical and optical properties of RF-sputtered NiO thin films

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Year: 2024
Type: article
Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
DOI: 10.1116/6.0003939
Authors: Nguyen Khac Binh, Pham Ngoc Yen Nhi, Tran Bao Quan, Pham Minh Tam, Nguyen Ngoc Phuong, Dao Minh Tuan, Pham Thi Kim Hang, Pham Hoai Phuong
Institutions: Trường ĐH Nguyễn Tất Thành, Vietnam National University Ho Chi Minh City, Ho Chi Minh City University of Science, Ho Chi Minh City University of Technology and Engineering, Vietnam Academy of Science and Technology
Language: English

Topic: ZnO doping and properties
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences

Open Access status: closed

Funder: Trường Đại học Nguyễn Tất Thành
Award: G8249556451
OpenAlex ID: W4404141730
FWCI: 0.768
Cites: 33
Cited by: 8
Related to: 10
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