Work

Modeling and characterization of AlN-Based piezoelectric micromachined ultrasonic transducers

Year: 2024

Type: article

Abstract: In this paper, we present the modeling and characterization of AlN-based piezoelectric micromachined ultrasonic transducers (PMUTs) dedicated to biomedical applications. Our study encompasses detailed analytical modeling of these transducers in both air and water environments. The model is confronted with finite element simulations that account for realistic issues such as imperfect clamping. To validate the model’s relevance, we compare its predictions with results from optical, electrical, and acoustical characterization. This comprehensive approach provides a robust framework for understanding PMUT behavior and facilitates efficient modeling of future devices.

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/1361-6439/ad902e

Authors: Romain Liechti, François Blard, Jean-Rémi Chatroux, Jean-Claude Bastien, Aude Lefèvre, Hélène Lhermet, Bruno Fain

Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Laboratoire d'Électronique des Technologies de l'Information

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: Electronic Components and Systems for European Leadership, CHIST-ERA

OpenAlex ID: W4404170824

FWCI: 0.314

Cites: 32

Cited by: 3

Related to: 10