Work

Analysis of uncertainty in measurement of electron temperature in low-pressure inductively coupled plasmas using microwave cutoff probe

Year: 2024

Type: article

Source: Plasma Sources Science and Technology

DOI: 10.1088/1361-6595/ad9054

Authors: Hee-Jung Yeom, Gwang-Seok Chae, Jung-Hyung Kim, Hyo-Chang Lee

Institutions: Korea Research Institute of Standards and Science, Korea Aerospace University

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Ministry of Trade, Industry and Energy, Korea Research Institute of Standards and Science, National Research Foundation of Korea, National Research Council of Science and Technology, Korea Semiconductor Research Consortium, Korea Evaluation Institute of Industrial Technology

Awards: G1491680630, G2978557231, G3969275231, G5031028196, G6764738055, G75951965

OpenAlex ID: W4404170981

FWCI: 0.625

Cites: 36

Cited by: 6

Related to: 10