Work

Asymmetric Proton-Exchange-Enhanced Lithium Niobate and Silicon Low-Temperature Direct Bonding with an Ultrathin Heterogeneous Interface

Year: 2024

Type: article

Source: ACS Applied Materials & Interfaces

DOI: 10.1021/acsami.4c14350

Authors: Yu Du, Yuanshu Zou, Bingxuan Zhu, Heng Jiang, Yao Chai, Chi Chung Tsoi, Xuming Zhang, Chenxi Wang

Institutions: Hong Kong Polytechnic University, Harbin Institute of Technology

Language: English

Topic: 3D IC and TSV technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Research Grants Council, University Grants Committee, Hong Kong Polytechnic University, Natural Science Foundation of Heilongjiang Province

Awards: Compact Planar Artificial Compound Eyes using Tunable Liquid Microlens Arrays, G1574474281, G1616974612, G2015552011, G2120733317, G2478912089, G2837680846, G2908046932, G3761973838, G4170200233, G4188369715, G4360387092, G4521019973, G4765973452, G574229778, G5796035613, G604931522

OpenAlex ID: W4404176309

FWCI: 1.437

Cites: 62

Cited by: 14

Related to: 10