Laser self-reference technique for high-precision lithographic alignment
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3036345
Authors: Shuonan Shan, Zijian Zhong, Tianshi Lu, Xinghui Li
Institution: Tsinghua University
Language: English
Subfield: Mechanical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4404178778