Work

Efficient curvilinear optical proximity correction using non-uniform B-spline curves

Year: 2024

Type: article

Source: Applied Optics

DOI: 10.1364/ao.537002

Authors: He Yang, Yanqiu Li, Miao Yuan, Zhaoxuan Li, Weichen Huang, Zhen Li

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, National Science and Technology Major Project

Awards: G1868669931, G2214122415

OpenAlex ID: W4404183762

FWCI: 0.822

Cites: 30

Cited by: 8

Related to: 10