Work

Design of an atomic layer deposition system with in situ reflection high energy electron diffraction

Year: 2024

Type: article

Source: Review of Scientific Instruments

DOI: 10.1063/5.0206286

Authors: Alexandra J. Howzen, Justin Caspar, Alparslan Oztekin, Nicholas C. Strandwitz

Institution: Lehigh University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

Award: CAREER: Probing Crystallization of Atomic Layers Using In Situ Electron Diffraction

OpenAlex ID: W4404228931

FWCI:

Cites: 44

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Related to: 10