Work

Electron series resonance excited in the 27.12 MHz magnetron sputtering discharge

Year: 2024

Type: article

Source: Plasma Sources Science and Technology

DOI: 10.1088/1361-6595/ad910c

Author: Chao Ye

Institution: Soochow University

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G2918114003

OpenAlex ID: W4404232323

FWCI: 0.103

Cites: 40

Cited by: 1

Related to: 10