Fringe-Field Actuation of MEMS Cantilever Resonators: Capacitance Model for Frequency-Amplitude Response of Parametric Resonance
Year: 2024
Type: conference-paper
Authors: Miguel A. Martinez, Dumitru I. Caruntu
Institution: The University of Texas Rio Grande Valley
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4404310517