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Low-G In-Plane Multi-Directional MEMS Inertial Switch With Multiple Acceleration Thresholds

Year: 2024

Type: conference-paper

Abstract: This paper reports a low-g in-plane MEMS inertial switch with multiple acceleration thresholds in multiple sensing directions. Designed for essential monitoring, this device targets low-g accelerations for health and safety applications. The device design utilizes the standard silicon-on-insulator micromachining process (SOIMUMPs) to simplify both fabrication and packaging. Through extensive testing, we demonstrate the switch ability to detect accelerations ranging from 45g to 88g. Despite minor discrepancies due to fabrication imperfections, the experimental results closely match the finite-element simulation results.

DOI: 10.1115/detc2024-143844

Authors: Yousef Algoos, Qiu Xu, Raed Alahmdi, Eric Feron, Mohammad I. Younis

Institutions: King Abdullah University of Science and Technology, Saudi Aramco (Saudi Arabia), Binghamton University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

OpenAlex ID: W4404310568

FWCI: 0.806

Cites:

Cited by: 1

Related to: 10