Work

Fabrication of Rotary Comb Drives With Floating Center

Year: 2024

Type: conference-paper

DOI: 10.1115/detc2024-143428

Authors: Matteo Verotti, Alvise Bagolini, Leandro Lorenzelli, Rocco Crescenzi, Nicola Pio Belfiore

Institutions: University of Genoa, Fondazione Bruno Kessler, Sapienza University of Rome, Roma Tre University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404310637

FWCI:

Cites:

Cited by:

Related to: 10