Work

Electrostatically Actuated BIO-MEMS Circular Membrane Resonator Sensors: Voltage Response of Primary Resonance

Year: 2024

Type: conference-paper

DOI: 10.1115/detc2024-143015

Authors: Dumitru I. Caruntu, Marcos Alipi

Institution: The University of Texas Rio Grande Valley

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404310643

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