Work

Extending depth of field for dark-field wafer surface inspection systems using digital holography

Year: 2024

Type: conference-paper

Source: Advanced Optical Manufacturing Technologies and Applications and International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM)

DOI: 10.1117/12.3046482

Authors: Zhenzhen Ding, Min Xu, Xinlan Tang, Fei Yu

Institution: Fudan University

Language: English

Topic: Digital Holography and Microscopy

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4404316795

FWCI: 4.588

Cites: 16

Cited by: 2

Related to: 10